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NIOBIUM SPUTTERING TARGET

NIOBIUM SPUTTERING TARGET(图1)NIOBIUM SPUTTERING TARGET(图2)NIOBIUM SPUTTERING TARGET(图3)


Material Type Niobium Z Ratio 0.492
Symbol Nb Sputter DC
Atomic Weight 92.90638 Max Power Density* 100
Atomic Number 41 (Watts/Square Inch)
Color/Appearance Gray, Metallic Type of Bond Indium, Elastomer
Thermal Conductivity 54 W/m.K Comments Attacks W source.
Melting Point (°C) 2,468    
Coefficient of Thermal Expansion 7.3 x 10-6/K    

Niobium Sputtering Target

Purity: Nb>99.9%, 99.95%, 99.99%, 99.995%
Standard: ASTM B393-05
Density: >8.3g/cc
Recrystallization: >95%
Surface Roughness: Ra 0.8-1.6
Flatness: 0.1mm or 0.1%
We provides niobium target with uniform, high-density microstructure, and controlled texture, promoting uniform sputtering rates and generally superior sputtering behavior.

Chemical Composition of Niobium Sputtering Target

Grade Chemical Composition, Max
Fe Si Mo W Ti Cr Ta Ni O C H N Nb+Ta≥%
Nb3 20 20 80 100 10 10 1000 20 250 100 15 150 99.9
Nb2 10 10 50 50 5 5 500 10 200 50 10 100 99.95
Nb1 5 5 10 20 1 1 100 1 100 30 10 50 99.99

Niobium Sputtering Target Specifications

We can supply 8″, 12″ niobium round shape sputtering target. The largest disc target that we can provide is with 29” diameter. Below are most of the standard sizes for our tantalum rectangle sputtering targets. If you do not see the size that you need, please feel free to contact us.

Sizes/Tolerance(mm.max)

Thickness Tolerance Width Tolerance Length Tolerance
GradeⅠ GradeⅡ
3-8 ±0.1 ±0.2 50-400 ±0.2 50-1800 ±0.2
8-14 ±0.1 ±0.2 50-350 ±0.2 50-1500 ±0.2
≥14 ±0.1 ±0.2 50-300 ±0.2 50-1200 ±0.2

Sizes/Tolerance(mm.max)

Thickness Tolerance Diameter Diameter Tolerance
GradeⅠ GradeⅡ
3-8 ±0.1 ±0.2 50-450 ±0.2
8-14 ±0.1 ±0.2 50-450 ±0.2
≥14 ±0.1 ±0.2 50-400 ±0.2




 


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