Vanadium Oxide Sputtering Target
Vanadium(V) oxide (vanadia) is a brown/yellow solid, although its color is deep orange when freshly precipitated from an aqueous solution. Because of its high oxidation state, it is both an amphoteric oxide and an oxidizing agent. From the industrial perspective, it is the most important vanadium compound, being the principal precursor to alloys of vanadium, and it is a widely used industrial catalyst.
Vanadium Oxide Sputtering Target Properties
|
Material |
Vanadium Oxide |
|
Chemical Formula |
V2O5 |
|
Color/ Appearance |
Orange-Yellow, Crystalline Solid |
|
Melting Point |
690℃ |
|
Theoretical Density (g/cc) |
3.36 |
|
Z Ration |
1 |
|
Sputter |
RF |
|
Type of Bond |
Indium, Elastomer |
Vanadium Oxide Sputtering Target Specifications
Purity : 99.9%
Size: Circular: Diameter <= 14inch, Thickness >= 1mm
Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm
Vanadium Oxide Sputtering Target Applications
1. Used in semiconductor, chemical vapor deposition (CVD), physical vapor deposition (PVD) display, and optical applications.
2. Vanadium oxide (V2O5) is used in ceramics as a catalyst and to produce superconducting magnets.
