| Material | Vanadium |
|---|---|
| Chemical Formula | V |
| Atomic Weight | 50.9415 |
| Color/ Appearance | Silvery Gray, Metallic |
| Melting Point | 1890℃ |
| Thermal Conductivity | 23 W/m.K |
| Coefficient of Thermal Expansion | 8.4 x 10-6/K |
| Theoretical Density (g/cc) | 5.96 |
| Z Ration | 0.53 |
| Sputter | DC |
| Max Powder Density (Watts/Square Inch) | 50 |
| Type of Bond | Indium, Elastomer |
| Purity | 99.5%, 99.9% |
|---|---|
| Shape | Disc targets, plate targets, column targets, step targets, custom-made |
| Size | Circular: Diameter < 14inch, Thickness > 1mm; Block: Length < 32inch, Width < 12inch, Thickness > 1mm |
The sputtering targets we produced are of high purity. The most important benefits are that the films possess an outstanding electrical conductivity level and minimized particle formation during the PVD process. Below form is a formal certificate of analysis for the 3N high purity Vanadium sputtering target.
2. Gas elements are analyzed using LECO.
| Element | Actual | Units | Element | Actual | Units |
|---|---|---|---|---|---|
| Na | ppm | Ni | ppm | ||
| Mg | ＜20 | ppm | Cu | ＜100 | ppm |
| Al | ＜20 | ppm | Zn | ＜50 | ppm |
| Si | ppm | As | ＜20 | ppm | |
| P | ppm | Zr | ＜20 | ppm | |
| K | ＜10 | ppm | Mo | ＜50 | ppm |
| Ca | ＜10 | ppm | Cd | ＜20 | ppm |
| Ti | ppm | Sn | ＜20 | ppm | |
| V | Matrix | ppm | Sb | ＜20 | ppm |
| Cr | ＜50 | ppm | Ta | ＜50 | ppm |
| Mn | ＜50 | ppm | W | ＜50 | ppm |
| Fe | ＜100 | ppm | Pb | ＜20 | ppm |
| Co | ＜100 | ppm | Bi | ＜20 | ppm |
| Se | ppm | Tl | ＜10 | ppm | |
| O | ＜20 | ppm | C | ＜20 | ppm |
| N | ＜20 | ppm | H | ppm | |
| S | ＜20 |